Funding provided for tooling and facilities investments in associates Funding provided for tooling and facilities investments in associates Increase (decrease) in legal reserves, research and development expenditures, equity Increase (decrease) in legal reserves, research and development expenditures, equity Cost of sales Cash flows from (used in) financing activities Accrued And Other Liabilities Accrued And Other Liabilities Purchase Of Treasury Shares Purchase Of Treasury Shares Cash flows from (used in) investing activities Adjustments for decrease (increase) in finance receivables Adjustments for decrease (increase) in finance receivables Number of Additional Shares Issued Number of Additional Shares Issued Adjustment For Increase (Decrease), Current Tax Assets And Liabilities Adjustment For Increase (Decrease), Current Tax Assets And Liabilities Noncash Portion Of Property, Plant And Equipment In Investing Activities Noncash Portion Of Property, Plant And Equipment In Investing Activities Unamortized discount included in other assets Debt Instrument, Unamortized Discount, Current Accumulated Share Of Other Comprehensive Income Of Associates And Joint Ventures Accounted For Using Equity Method, Net Of Tax Accumulated Share Of Other Comprehensive Income Of Associates And Joint Ventures Accounted For Using Equity Method, Net Of Tax Cash flows from (used in) operating activities Net system sales Net system sales Accumulated Gains (Losses) On Equity Investments, Net Of Tax, Reserve Of Fair Value Adjustment Accumulated Gains (Losses) On Equity Investments, Net Of Tax, Reserve Of Fair Value Adjustment Other Comprehensive Income, Net Of Tax, Cash Flow Hedges, Accumulated Reserve Of Cash Flow Hedges Other Comprehensive Income, Net Of Tax, Cash Flow Hedges, Accumulated Reserve Of Cash Flow Hedges Increase (decrease) in cash and cash equivalents after effect of exchange rate changes Cost of system sales Cost of system sales Repayment Of Debt And Lease Obligations Repayment Of Debt And Lease Obligations Cost of service and field options sales Cost of service and field options sales Proportion of ownership interest in associate, Carl Zeiss SMT Holding GmbH & Co. KG Proportion of ownership interest in associate, Carl Zeiss SMT Holding GmbH & Co. KG Net service and field option sales Net service and field option sales Non-Current Loans Receivable Revenue from contracts with customers Adjustments For Increase (Decrease), Contract Assets And Liabilities Adjustments For Increase (Decrease), Contract Assets And Liabilities Accumulated Gains (Losses) On Exchange Differences On Translation Of Foreign Operations, Net Of Tax, Reserve Of Exchange Differences On Currency Translation Accumulated Gains (Losses) On Exchange Differences On Translation Of Foreign Operations, Net Of Tax, Reserve Of Exchange Differences On Currency Translation Adjustments For Impairment And Loss On Disposal Adjustments For Impairment And Loss On Disposal Adjustments For Inventory Reserve Adjustments For Inventory Reserve Gross profit Increase (decrease) in cash and cash equivalents before effect of exchange rate changes Current Loans Receivables Loans receivable